Optical Galvanometers

Optical Galvanometers

Keywords: Optical Galvanoter, galvos, scanner, scanning, CTI, scanlab,

The exceptional dynamics OSSL Series scanners are the result of years of experience in developing and manufacturing scanners scan systems and scan solutions for industrial use.

1. OSJC Series Galvanometer Optical Scanners

OSJC series galvanometer scanners are designed by adopting the magnet-moving structure, combining the most advanced international photoelectric sensor technology and the PDM control mode, and using the military-grade processes and technologies.

  • Adopted the photoelectric sensors which imported from America, and owned the proprietary intellectual property rights.

  • Differential photoelectric sensor for accurate detection of motor rotor position, good linearity, lower drift, high resolution and repeat positioning.

  • Accurate load design for 10mm mirrors, high accuracy of motor assembly, reasonable structure, very small static friction coefficient and zero offset, all ensured the best dynamic characteristics for the whole system.

  • Drives with advanced detection ability of position and speed, greatly improved the dynamic response performance and scanning speed of the whole system.

  • Design of overload, over-current and reverse connect protection, makes the system running more reliable.

  • The whole system adopted the optimization Designing of electromagnetic compatibility, with high signal-to-noise ratio and strong anti-interference ability.

  • This scanner system solved the common problems of motor temperature drift, signal interference and zero drift, etc.

Model OSJC-2203 & OSJC-8330

Part numberOSJC-2203OSJC-8330
Speed
Marking Speed (1), mm/s70001000
Positioning Speed, (1), mm/s120001000
Writing Speed (2), (cps)520125
Step Response Time(1% of full scale), us285940
Step Response Time(10% of full scale), us8901500
Tracking Error Time, us≤160≤440
Precision and Error
Linearity99.9%99.9%
Repeatability (RMS), urad<8<8
Gain Error, mrad<5<5
Zero Offset, mrad<5<5
Long-term Drift Over 8 Hours, mrad<0.5<0.5
Scale Drift, ppm/oC<40<40
Zero Drift, urad/ oC<15<15
Scan Mirror Damage Threshold
K9 Mirror, J/cm^29.19.1
Silicone Mirror, J/cm^21010
Laser Wavelength (3), nm10600/1064/35510600/1064/355
Power and Signal
Input Voltage, VDC±15±15
RMS Current, A22
Interface Signal (Digital)XY2-100XY2-100
Interface Signal (Analog), V±5±5
Peak Current, A88
Position Signal Input Resistance, kΩ10±1%10±1%
Machinery Scan Angle (4), o±15±15
Working Current, Temperature, Dimension
Working Temperature, oC0--450--45
Storage Temperature, oC-10--+60-10--+60
Suitable Laser Beam Size, mm1030
Galvanometer Scanner Dimension (DXL), mmD22X35.4+D31X17.6D38X81.5+D47X20.5
Galvanometer Scanner Weight, g120750

Note: The above data are tested after 30 min warm-up.

  1. With F-theta objective, F=160mm, marking 2mm height single character

  2. With F-theta objective, F=160mm, marking 1mm height single character per

  3. second Special wavelength coating film can be customized

  4. If any special requirement, customization is available.

Model OSJC-8220

Working Temperature0-45℃
Linearity99.9%
Setting Time≤0.8ms
Scale Drift<40PPM/℃
Zero Drift<15ΩRad./℃
Long-term Drift Over 8 Hours<0.5mRad
RMS Current3.5A
Peak Current20A(Max)
Maximum Scan Angle±15°
Storage Temperature-10 to +60℃
Resolution12Ωrad
Repeatability8Ωrad
Input Aperture20.0mm
Beam Displacement26mm
Motor Weight280g
Frequency≤500Hz

Servo Driver Board Specification

Input Voltage±24VDC

Interface Signal
DigitalXY2-100
Analog±5V, ±10V
Analog Signal Input Resistance200KΩ±1%(Differential input)
Position Signal Input Resistance1KΩ±1%
Position Signal Input Scale Factor0.33V/°
Position Signal Output Scale Factor0.33V/°
Working Temperature0-45℃
Dimension(DXL)D28X60+D36X19mm
Part NumberOSJC-1105OSJC -1403OSJC -2206
Input Aperture7mm9mm10mm
Linearity99.9%99.9%99.9%
Small Step Response Time0.3ms0.3ms0.35ms
Maximum Scan Angle±15°±15°±15°
Resolution12Ωrad12Ωrad12Ωrad
Repeatability8Ωrad8Ωrad8Ωrad
Working Temperature0-45℃0-45℃0-45℃
Storage Temperature-10 to +60℃-10 to +60℃-10 to +60℃
Input Voltage±15VDC±15VDC±15VDC
Interface Signal (Digital)XY2-100XY2-100XY2-100
Galvo Weight45g120g
Drive Board Dimension75x50x28mm75x50x28mm
Part NumberOSJC -7106OSJC -7110OSJC - 7210
Input Aperture10mm10mm10mm
Linearity99.9%99.9%99.9%
Small Step Response Time0.288ms0.5ms0.3ms
Maximum Scan Angle±15°±15°±15°
Resolution12Ωrad12Ωrad12Ωrad
Repeatability8Ωrad8Ωrad8Ωrad
Working Temperature0-45℃0-45℃0-45℃
Storage Temperature-10 to +60℃-10 to +60℃-10 to +60℃
Input Voltage±15VDC±15VDC±15VDC
Interface Signal (Digital)XY2-100XY2-100XY2-100
Galvo Weight120g120g220g
Driver Board Dimension75x50x28mm75x50x28mm75×50×28mm
Part NumberOSJC -7310OSJC -2207OSJC -2208
Input Aperture10mm12mm14mm
Linearity99.9%99.9%99.9%
Small Step Response Time0.5ms0.45ms0.6ms
Maximum Scan Angle±15°±15°±15°
Resolution12Ωrad12Ωrad12Ωrad
Repeatability8Ωrad8Ωrad8Ωrad
Working Temperature0-45℃0-45℃0-45℃
Storage Temperature-10 to +60℃-10 to +60℃-10 to +60℃
Input Voltage±15VDC±15VDC±15VDC
Interface Signal (Digital)XY2-100XY2-100XY2-100
Galvo Weight120g130g
Drive Board Dimension75x50x28mm75x50x28mm
Part NumberOSJC -2807OSJC -2808OSJC - 8220
Input Aperture16mm20mm20mm
Linearity99.9%99.9%99.9%
Small Step Response Time1ms1.2ms0.8ms
Maximum Scan Angle±15°±15°±15°
Resolution12Ωrad12Ωrad12Ωrad
Repeatability8Ωrad8Ωrad8Ωrad
Working Temperature0-45℃0-45℃0-45℃
Storage Temperature-10 to +60℃-10 to +60℃-10 to +60℃
Input Voltage±24VDC±24VDC±24VDC
Interface Signal (Digital)XY2-100XY2-100XY2-100
Galvo Weight280g280g280g
Drive Board Dimension90×64×34mm90×64×34mm80×54×33mm
Part NumberOSJC -3808OSJC -8330OSJC -8250
Input Aperture30mm30mm50mm
Linearity99.9%99.9%99.9%
Small Step Response Time1.6ms1.2ms2.5ms
Maximum Scan Angle±15°±15°±15°
Resolution12Ωrad12Ωrad12Ωrad
Repeatability8Ωrad8Ωrad8Ωrad
Working Temperature0-45℃0-45℃0-45℃
Storage Temperature-10 to +60℃-10 to +60℃-10 to +60℃
Input Voltage±24VDC±24VDC±24VDC
Interface Signal (Digital)XY2-100XY2-100XY2-100
Galvo Weight750g
Drive Board Dimension90×64×34mm

2. OSST Series Galvanometer Optical Scanners

Part numberOSST8162OSST8161OSST8063
Optical apertures supported, two-axis, diameter8mm10mm12mm
Response time0.2ms at 5mm beam0.45ms at 10mm beam0.6ms at 12mm beam
Max mechanical rotation angle±20-30°±20°±20°
Linearity99.9%, over ±20°99.9%, over ±20°99.9%, over ±20°
Average current0.9A0.9A1.5A
Peak current5A5A10A
Coil resistance3Ω±10%1.8Ω±10%2Ω±10%
Coil inductance180ΩH ±10%280ΩH ±10%260ΩH ±10%
Operation temp0-40 oC0-40 oC0-40 oC
Weight80g105g180g
DimensionD15x31+D15.4x11mmD22X36+D31x8.6+D21x9mmD22x36+D31x8.6+D21x9mm
Axis diameter2.1mm2.1mm2.1mm
Drive boardMatchedMatchedMatched
ApplicationLaser show, stage lightingSuper speed fly markingLaser marking, rapid prototype, trimming, radar etc.
Part numberOSST8166OSST8061OSST3808
Optical apertures supported, two-axis, diameter6mm20mm35mm
Response time0.3ms at 5mm beam0.7ms at 20mm beam1ms at 35mm beam
Max mechanical rotation angle±20°±20°±20°
Linearity99.9% over ±20°99.9% over ±20°99.9% over ±20°
Average current0.6A2A2.2A
Peak current1.5A15A10A
Coil resistance2.3Ω±10%2.1Ω±10%2Ω±10%
Coil inductance420ΩH ±10%360ΩH ±10%260ΩH ±10%
Operation temp0-40 oC0-40 oC0-40 oC
Weight26g210g520g
DimensionD10x16+D13x3+D15x10.5mmD28x58+D36x15+D25x5mmD38X76+D36x5+D25x5mm
Axis diameter1.1mm3.3mm7mm
Drive boardMatchedMatchedMatched
ApplicationHigh speed fly marking, high speed marking.Precise marking, prototype, trimming, radar.Precise marking, prototype, trimming, radar.

Remarks:

  • All the galvos are chrome coated cover.

  • The scan mirrors at the laser wavelengths of 1064nm, 532nm, 355nm, 266nm, 10.6um and others are available upon request.

3. OSSL Series Galvanometer Optical Scanners

The exceptional dynamics OSSL Series scanners are the result of years of experience in developing and manufacturing scanners, scan systems and scan solutions for industrial use. The motor section of each OS
SL series is ideally matched to the inertial load presented by the mirror. The optimized rotor design is largely responsible for the favorable dynamic properties and resonance characteristics. Axially pre-loaded precision ball bearings guarantee a backlash-free rotor assembly with high stiffness and low friction. Special attention has been paid to long bearing lifetimes.
The optical position detector system is characterized by high resolution, as well as good repeatability and drift values. The scanners are equipped with heaters and temperature sensors. This allows temperature stabilization for further enhancing long-term stability, even under fluctuating ambient conditions.
We provide all OSSL series scanners with suitable mirrors and mirror coatings for all typical laser wavelengths. In addition to very good reflection properties, the mirrors are also optimized with respect to inertial load, stiffness and flatness. The high quality of OSSL Series galvanometer scanners enables error-free operation in long-term and continuous use. Comprehensive measurements on custom test benches assure that the highest level of quality is continuously maintained.
Mounting
The rotationally symmetrical flange facilitates mounting. The scanner housing must be electrically insulated from the machine structure. Mirror stops are already integrated into the scanners. The mirror is directly bonded to the scanner’s shaft.
OSSL Series Galvanometer Scanners Specifications

Part numberOSSL-XSOSSL-TOSSL-SOSSL-MOSSL-L
Rotor inertia0.028 g·cm20.125 g·cm20.34 g·cm21.2 g·cm25.1 g·cm2
Torque constant2.3 N·mm/A5.3 N·mm/A7.5 N·mm/A15 N·mm/A24 N·mm/A
Coil resistance3.9 Ω2.8 Ω2.7 Ω2.2 Ω0.85 Ω
Coil inductance90ΩH145ΩH165ΩH275ΩH300ΩH
Max. RMS current (max. case temp. 50°C)1.8 A2.2 A2.5 A3.5 A5 A
Peak current6 A10 A10 A10 A15 A
Weight With cable49 g72 g263 g340 g425 g
Weight Without cable23 g46 g---
ConnectorSD-9 socketSD-9 socketSD-15 socketSD-15 socketSD-15 socket
Inertial Load recommended0.02 g·cm20.1 g·cm20.35 g·cm21.2 g·cm28 g·cm2
Inertial Load maximum0.05 g·cm20.5 g·cm21.5 g·cm26 g·cm225 g·cm2
Recommended Aperture7mm8.5mm10mm14mm20-30mm
Step Response Time (with SSV30) 1% of full scale (settling to 1/1000 of full scale, with recommended inertial load)0.23 ms0.24 ms0.25 ms0.40 ms0.8 ms
Dynamic Performance (with SSV30) Tracking error0.11 ms0.12 ms0.14 ms0.24 ms0.35 ms
Recommended drivermicroSSVmicroSSVminiSSV microAIO SSV30miniSSV SSV30SSV30


OSSL Series Scanner Common Specifications(all angles are in mechanical degrees)

Optical PerformanceMaximum scan angle±12°
Nonlinearity< 0.4 % ptp
Offset drift< 15Ωrad/K
Gain drift< 50 ppm/K
Repeatability5Ωrad
Position Detector (PD)Typical PD output signal - differential mode–11ΩA/°
Typical PD output signal - common mode–140ΩA
PD supply voltage6.5 V - 11.5 V
PD supply current35 mA - 60 mA
HeaterHeater resistance120 Ω
Temperature sensor resistance1000Ω@ 25°C,578Ω@40°C
Cable0.22 m long
Installationelectrically insulated
Operating Temperature25±20°C
Electrical Connections (with SSV30)Power supply voltage±(15+1.5) V DC
Input signalsAlternative:±4.8 V;±9.6 V; ±4.8 mA;±9.6 mA
Output signals3 status signals, TTL level
Long-term drift over 8 hours (with SSV30)with temperature stabilization (after warm-up)< 0.6 mrad optical
without temperature stabilization<0.3mrad optical plus temperature induced gain and offset drift
Operating Temperature (with SSV30)25±10°C

4. OSCT Series Optical Galvanometers

Our broad range of closed loop galvanometer-based optical scanning components and systems offer the systems integrator the maximum galvanometer-based performance for any positioning or scanning requirement. Our superior positioning performance comes from advanced actuator designs, innovative patented position detection techniques, the consistency of our high quality manufacturing process and our continued commitment to advancing the state of galvo technology. With our extensive range of scanning options, application expertise and world-wide technical support, we are ready to be your partner in scientific and OEM optical system applications.

Just as important as our superior positioning system performance is the product reliability, lifetime and support that you need for long term system and market success. Superior product lifetime and reliability result from disciplined design technique and simulation, the best in bearing and component technology and quality manufacturing processes and workmanship. We take great pride in the performance and the extensive lifetime of our products. These high standards in our manufacturing processes guarantee the performance consistency that you need to design the high calibre systems demanded in today’s competitive marketplace.
We offer a complete range of closed loop galvanometers, servo drivers and system options for the maximum in price/performance options, system design flexibility and ease of integration.

Optical Galvanometers

  • Proprietary Moving Magnet Actuator Technology for the highest positioning speed.

  • Proprietary Moving Coil Actuator Technology for the highest positioning accuracy.

  • Patented Capacitive Position Detector Technology for the highest positioning accuracy and stability

  • Patented Optical Position Detector Technology offers positioning accuracy at lower cost.

  • Product Consistency and Reliability for extended system lifetimes and uptime.

  • A Broad Range of Products sized for optimum performance for apertures from 1mm to 50mms.

These galvo technologies are offered in three families of optical scanning products.

  • The Moving Magnet Scanners with Advanced Optical Position Detector (62xxH series such as 6200H, 6210H, 6215H, 6220H, 6230H, 6231H, 6240H, 6250H, 6260H, and 83xxK series such as 8300K, 8310K, 8315K, 8320K, 8330K, 8331K, 8340K, 8350K, 8360K )

  • The Moving Magnet Scanners with Capacitive Position Detector (Model 6860, 6870, 6880)

  • The Moving Coil Scanners with Capacitive Position Detector (Model 6350, 6450, 6650, 6900, 6400)

Servo Drivers (Drive boards)

The key Servo Driver Technologies and offerings include:

  • Surface Mount Technology (SMT) driver boards for compact system size.

  • Proprietary Class 1 Integrating Servo Drivers for the highest positioning accuracy and stability.

  • Proprietary Class 0 Non-Integrating Servo Drivers for the highest speed and lowest cost.

  • System Control and Interface Features for ease of system integration.

These servo technologies are offered in analog and digital versions. The analog drivers include 670, 671, 672, 673, 677 series and the digital drivers include DC900, DC2000, and D3000 plus.

System Options

For more complete levels of system integration and solutions, we also provide the following system components and solutions:

  • Standard Two Axis X/Y Mounts and Mirrors Sets from 3mm to 50mm apertures (called marking heads, laser scanners).

  • Standard and Custom Mirrors for all galvos.

  • Standard and Custom Interface Cables.

  • PositionProtm PC-based Hardware and Software Galvo Control.

1. OSCT Series Optical Galvanometers

  • The combination of our Moving Magnet Actuator technology and our innovative patented Advanced Optical Position Detector design offers the highest positioning speed and excellent accuracy in the smallest, lower cost closed loop galvanometers. Scanning system applications can be designed and optimized for speed, size, cost and accuracy with typical beam diameters in the 1 to 3mm range.

  • The Moving Magnet Scanner's Positioning Speed comes from advanced galvanometer and actuator design for the highest system resonant frequency and RMS power capability. The higher resonant frequency of our moving magnet actuator design, the intense magnetic field strength of state of the art neodymium-iron-boron magnets and our advanced servo driver options allow superior system bandwidths, step response times and repetition rates with excellent wobble and jitter performance.

  • Our newly patented advanced optical position detector design coupled with the positioning precision of the moving magnet actuator provides excellent repeatability and accuracy . The advanced optical position detector is designed to provide high positioning linearity, repeatability and stability over time and temperature, and lower closed loop galvo cost in the smallest, most compact package.

  • Superior product lifetime and reliability result from disciplined design technique, the best in bearing technology and quality manufacturing processes and workmanship. We take great pride in the performance of our products. Our scanner designs are computer modelled and have been life-test proven to billions of cycles of operation. Our high standards of manufacturing quality guarantees the performance consistency that you need to design the high quality systems demanded in today's competitive marketplace.

1.1 62xxH Series Optical Galvanometersoptical scanner, galvos, galvanometer

Our popular 62xxH Series of closed loop, galvanometer-based scanners is consistently the industry’s leading solution for high-performance laser beam steering. Each motor combines our moving magnet actuator technology with a position detector only available from Cambridge Technology. This patented technology features stable positioning while achieving the fastest scan speeds available in its category. Whether your focus is on speed, accuracy, or footprint, the 62xxH Series delivers both performance and value.
Attain high-performance and reliability for your value-driven application:

  • Industry’s fastest motor speeds deliver maximum throughput with long-term reliability

  • High-accuracy output across a diverse range of application scanning needs

  • Robust design supports consistent stability over long product lifetimes

  • Footprint of compact models ensures ease of integration for small spaces

  • Available with a wide range of mirrors sizes (3 to 50 mm) and coating options

Part number6200H6210H6215H6220H
Recommended Aperture Size (mm)3 to 73 to 73 to 75 to 10
Wavelength Options355 nm / 532 nm / 1030 nm - 1080 nm / 9.4 Ωm - 10.6 Ωm Broadband Coatings: 350 nm – 12 Ωm
Maximum Scan Angle (degrees)40°40°40°40°
Rotor Inertia (gm·cm2, ±10%)0.0130.0180.0280.125
Torque Constant (dyne·cm/amp, ±10%)1.20x1042.79x1043.78x1046.17x104
Maximum Rotor Temperature (°C)110°110°110°110°
Thermal Resistance (Rotor to Case) (°C/watt, max)3.82.01.01.0
Coil Resistance (ohms, ±10%)2.143.72.52.79
Coil Inductance (ΩH, ±10%)5210994180
Back EMF Voltage (ΩV/°/sec, ±10%)20.948.766108
RMS Current (A at Tcase = 50°C, maximum)2.32.44.13.9
Peak Current (A, maximum)682020
Small Angle Step Response1 (typical)3 mm Y mirror
130 Ωs
3 mm Y mirror
100 Ω
3 mm Y mirror
200 Ω
5 mm Y mirror
250 Ω
Weight (grams, typical)13.31825.842.5
Dimension (mm)12.7x2912.7x37.312.7x53.815.3x52
Part number6230H6231H6240H6250H6260H
Recommended Aperture Size (mm)8 to 158 to 1512 to 2525 to 7530 to 100
Wavelength Options355 nm / 532 nm / 1030 nm - 1080 nm / 9.4 Ωm - 10.6 Ωm Broadband Coatings: 350 nm – 12 Ωm
Maximum Scan Angle (degrees)40°40°40°40°40°
Rotor Inertia (gm·cm2, ±10%)0.970.822.415.647.5
Torque Constant (dyne·cm/amp, ±10%)1.31x1051.11x1052.0x1057.08x1058.5x105
Maximum Rotor Temperature (°C)110110110110110
Thermal Resistance (Rotor to Case) (°C/watt, max)0.81.00.620.350.2
Coil Resistance (ohms, ±10%)1.071.271.031.690.60
Coil Inductance (ΩH, ±10%)1731763501030530
Back EMF Voltage (ΩV/°/sec, ±10%)22919534612201480
RMS Current (A at Tcase = 50°C, maximum)7.15.88.27.112
Peak Current (A, maximum)2525252040
Small Angle Step Response1 (typical)10mm mirror 250us10mm Y mirror 250us15mm Y mirror 350us50 mm Y mirror 3ms50 mm Y mirror 2.1ms
Weight (grams, typical)2671423565901200
Dimension (mm)33x7033x68.233x86.540.6x113.440.6x159.9

Position Detector (specifications common across all models):

Linearity99.9% minimu m, over 20°; 99.5% typical, over 40°
Scale Drift50 ppm/°C, maximum
Zero Drift15 Ωrad/°C, maximum
Repeatability, Short-Term8 Ωrad
Output Signal, Common Mode155 ΩA minimum, with AGC current of 30 mA
Output Signal, Differential Mode12 ΩA/° (±2.5%) at common mode current of 155 ΩA
Output Signal, Common Mode to Differential Mode Ratio12.5 (±2.5%)

(1) Model 6210H Moving Magnet Closed Loop Galvanometer Based Optical Scanner

Supports apertures of 3mm, 4mm, 5mm, 6mm, and 7mm. Shown here with A connecter and 3mm Y mirror.All Position Detector specifications apply with our servo driver after a 30 second warm-up. All angles are in mechanical degrees. Consult manual for complete operating instructions.
Mechanical

Rated Angular Excursion:40°
Rotor Inertia:0.018 gm cm2 , +/-10%
Torque Constant:2.79x104 dyne cm/amp, +/-10%
Maximum Rotor Temperature:110° C
Thermal Resistance (Coil to Case):2° C/Watt, Max

Electrical/Drive Mechanism

Coil Resistance:3.72 Ohms, +/-10%
Coil Inductance:109 µH, +/-10%
Back EMF Voltage:48.7 µV/degree/sec, +/-10%
RMS Current:2.4 Amperes at Tcase of 50° C, Max
Peak Current:8 Amperes, Max
Small Angle Step Response Time:100 µs, with 3mm, Y mirror, settled to 99%

Position Detector

Linearity:99.9 %, Minimum, over 20 degrees, 99.5% Typical, over 40 degrees
Scale Drift:50 PPM/° C, Maximum
Zero Drift:15 µrad/° C, Maximum
Repeatability, Short Term:8 microradians
Output Signal, Common Mode:155 µA with AGC current of 30mA, +/-20%
Output Signal, Differential Mode:12 µA/°, at common mode current of 155 µA, +/-20%

(2) Model 6230H Moving Magnet Closed Loop Galvanometer Based Optical Scanner

The 6230H galvanometer can be designed and optimized for speed, size, cost and accuracy with typical beam diameters of 8mm, 10mm, 12mm, and 15mm. It is shown here with a 10mm Y mirror. All Position Detector specifications apply with our servo driver after a 30 second warm-up. All angles are in mechanical degrees. Consult manual for complete operating instructions.

Mechanical Specifications

Rated Angular Excursion:40°
Rotor Inertia:0.97 gm cm2, +/-10%
Torque Constant:1.31x105 dyne cm/amp, +/-10%
Maximum Rotor Temperature:110°C Thermal
Resistance (Rotor to Case):0.80°C/Watt, Max

Electrical Specifications/Drive Mechanism

Coil Resistance:1.07 Ohms, +/-10%
Coil Inductance:173 uH, +/-10%
Back EMF Voltage:229 µV/degree/sec, +/-10%
RMS Current:7.1 Amperes at Tcase of 50°C, Max
Peak Current:25 Amperes, Max
Small Angle Step Response Time:250 µs, with 8mm Y Mirror, settled to 99% 250 µs, with 10mm Y mirror, settled to 99%

Position Detector

Linearity:99.9 %, Minimum, over 20 degrees, 99.5% Typical, over 40 degrees
Scale Drift:50 PPM/°C, Maximum
Zero Drift:15 µrad/°C, Maximum
Repeatability, Short Term:8 microradians
Output Signal, Common Mode:155 µA with AGC current of 30mA, +/-20%
Output Signal, Differential Mode:11.7 µA/°, at common mode current of 155 µA, +/-20%
  • 6230HM50A  MiniCT split cable 671XX connectors with 12” cable, ±25 optical degrees. Mxx denotes maximum optical degrees.

  • 6230HB with 67723H will work

  • 6230H with 67123H & adaptor cable 6010-20-xxx will work.

  • 6230HA with 671 will work.

Remark: if the connectors of the galvo and drive board are not matched, an adaptor cable is needed to make them matched. For example, an adaptor cable is needed if you want to use 6230HB with 67123H.

(3) Model 6231HC Moving Magnet Closed Loop Galvanometer Based Optical Scanner

The 6231H supports apertures of 8mm, 10mm, 12mm, and 15mm. It is shown here with the C connector and a 10mm Y mirror. All Position Detector specifications apply with our servo driver after a 30 second warm-up. All angles are in mechanical degrees. Consult manual for complete operating instructions.
Mechanical

Rated Angular Excursion:40°
Rotor Inertia:0.82 gm cm2 , +/-10%
Torque Constant:1.11x105 dyne cm/amp, +/-10%
Maximum Rotor Temperature:110° C
Thermal Resistance (Rotor to Case):1° C/Watt, Max

Electrical/Drive Mechanism

Coil Resistance:1.27 Ohms, +/-10%
Coil Inductance:176 µH, +/-10%
Back EMF Voltage:195 µV/degree/sec, +/-10%
RMS Current:5.8 Amperes at Tcase of 50° C, Max
Peak Current:25 Amperes, Max
Small Angle Step Response Time:250 µs, with balanced load of 0.3 gm*cm2

Position Detector

Linearity:99.9 %, Minimum, over 20 degrees, 99.5% Typical, over 40 degrees
Scale Drift:50 PPM/° C, Maximum
Zero Drift:15 µrad/° C, Maximum
Repeatability, Short Term:8 microradians
Output Signal, Common Mode:155 µA with AGC current of 30mA, +/-20%
Output Signal, Differential Mode:11.7 µA/°, at common mode current of 155 µA, +/-20%

(4) Model 6231HB Moving Magnet Closed Loop Galvanometer Based Optical Scanner

Mechanical Specifications
Optical Aperture, Two-Axis, Std8, 10 & 12mm
Rated Angular Excursion40º
Rotor Inertia0.82gm*cm2, +/ - 10%
Torque Constant11,100dyne-cm/amp, +/ - 10%
Maximum Coil Temperature110ºC
Thermal Resistance (Coil to Case)1.0ºC/Watt, Max
Electrical Specifications Drive Mechanism
Coil Resistance1.27Ohms, +/- 10%
Coil Inductance176ΩH, +/- 10%
Back EMF voltage195mV/degree/sec, +/- 10%
RMS Current5.8Amperes at Tcase of 50ºC, Max
Peak Current25Amperes, Max
Small Angle Step Response Time0.25ms, with balanced load of 0.3 gm*cm2
Position Detector
Linearity99.99Minimum, over 20 degrees
Scale Drift50PPM/ºC, Maximum
Zero Drift15Ωrad/º C, Maximum
Repeatability, Short Term8microradians
Output Signal, Common Mode155ΩA with AGC current of 30 mA, +/-20%
Output Signal, Differential Mode11.7ΩA/º, at common mode current of 155 ΩA, +/-20%
Driver67723

(5) Model 6240H Moving Magnet Closed Loop Galvanometer Based Optical Scanner

The 6240H galvanometer can be designed and optimized for speed, size, cost and accuracy with typical beam diameters of 12mm, 15mm, 20mm, 25mm, and 30mm. It is shown here with a 12mm Y mirror. All Position Detector specifications apply with our servo driver after a 30 second warm-up. All angles are in mechanical degree. Consult manual for complete operating instructions.
Mechanical Specifications

Rated Angular Excursion:40°
Rotor Inertia:2.4 gm cm2, +/-10%
Torque Constant:2.0x105 dyne cm/amp, +/-10%
Maximum Coil Temperature:110°C
Thermal Resistance (Coil to Case):0.62°C/Watt, Max

Electrical Specifications/Drive Mechanism

Coil Resistance:1.03 Ohms, +/-10%
Coil Inductance:350µH, +/-10%
Back EMF Voltage:346 µV/degree/sec, +/-10%
RMS Current:8.2 Amperes at Tcase of 50°C, Max
Peak Current:25 Amperes, Max
Small Angle Step Response Time:300 µs, with 12mm Y mirror, settled to 99%
 350µs, with 15mm Y mirror, settled to 99%
 650 µs, with 20mm Y mirror, settled to 99%

Position Detector

Linearity:99.9 %, Minimum, over 20 degrees, 99.5% Typical, over 40 degrees
Scale Drift:50 PPM/°C, Maximum
Zero Drift:15 µrad/°C, maximum
Repeatability, Short Term:8 microradians
Output Signal, Common Mode:155 µA with AGC current of 30mA, +/-20%
Output Signal, Differential Mode:11.7 µA/°, at common mode current of 155 µA, +/-20%

1.2 83xxK Series Optical Galvometers

Our 83xxK Series of scanners builds on the 62xxH Series’ speed and reliability with even higher resolution and thermal stability for the most demanding, high-precision applications. Each model includes our best-in-class, moving magnet actuator technology and enhanced position detector only available from Cambridge Technology. With its lower drift and noise, the 83xxK Series is ideal for applications requiring precise features such as micromachining and large field applications that are dependent on stability.
Achieve the highest level of scanning accuracy, speed, and reliability:

  • Industry’s fastest motor speeds, with even higher resolution and stability

  • Superior precision and accuracy that ensures high-quality processing output

  • Robust design supports consistent reliability over long product lifetimes

  • Footprint of compact models ensures easy system integration for small spaces

  • Available with a wide range of mirror sizes (3 to 50 mm) and coating options

Part number8300H8310H8315H8320H
Recommended Aperture Size (mm)3 to 73 to 73 to 75 to 10
Wavelength Options355 nm / 532 nm / 1030 nm - 1080 nm / 9.4 Ωm - 10.6 Ωm Broadband Coatings: 350 nm – 12 Ωm
Maximum Scan Angle (degrees)40°40°40°40°
Rotor Inertia (gm·cm2, ±10%)0.0130.0180.0280.125
Torque Constant (dyne·cm/amp, ±10%)1.20x1042.79x1043.78x1046.17x104
Maximum Rotor Temperature (°C)110°110°110°110°
Thermal Resistance (Rotor to Case) (°C/watt, max)3.82.01.01.0
Coil Resistance (ohms, ±10%)2.143.72.52.79
Coil Inductance (ΩH, ±10%)5210994180
Back EMF Voltage (ΩV/°/sec, ±10%)20.948.766108
RMS Current (A at Tcase = 50°C, maximum)2.32.44.13.9
Peak Current (A, maximum)682020
Small Angle Step Response1 (typical)3 mm Y mirror
130 Ωs
3 mm Y mirror
100 Ω
3 mm Y mirror
130 Ω
5 mm Y mirror
250 Ω
Weight (grams, typical)13.31825.842.5
Dimension (mm)12.7x2912.7x37.312.7x53.815.3x52
Part number8330H8331H8340H8350H8360H
Recommended Aperture Size (mm)8 to 158 to 1512 to 2525 to 7530 to 100
Wavelength Options355 nm / 532 nm / 1030 nm - 1080 nm / 9.4 Ωm - 10.6 Ωm Broadband Coatings: 350 nm – 12 Ωm
Maximum Scan Angle (degrees)40°40°40°40°40°
Rotor Inertia (gm·cm2, ±10%)0.970.822.415.647.5
Torque Constant (dyne·cm/amp, ±10%)1.31x1051.11x1052.0x1057.08x1058.5x105
Maximum Rotor Temperature (°C)110110110110110
Thermal Resistance (Rotor to Case) (°C/watt, max)0.81.00.620.350.2
Coil Resistance (ohms, ±10%)1.071.271.031.690.60
Coil Inductance (ΩH, ±10%)1731763501030530
Back EMF Voltage (ΩV/°/sec, ±10%)22919534612201480
RMS Current (A at Tcase = 50°C, maximum)7.15.88.27.112
Peak Current (A, maximum)2525252040
Small Angle Step Response1 (typical)10mm mirror 250us10mm Y mirror 250us15mm Y mirror 350us50 mm Y mirror 3ms50 mm Y mirror 2.1ms
Weight (grams, typical)2671423565901200
Dimension (mm)33x7333x68.233x86.540.6x113.440.6x159.9

Position Detector (specifications common across all models):

Linearity99.9% minimu m, over 20°; 99.5% typical, over 40°
Scale Drift15 ppm/°C, maximum
Zero Drift5 Ωrad/°C, maximum
Repeatability, Short-Term8 Ωrad
Output Signal, Common Mode283 ΩA minimum, with AGC current of 60 mA
Output Signal, Differential Mode22.6ΩA/° (±2.5%) at common mode current of 283 ΩA
Output Signal, Common Mode to Differential Mode Ratio12.5 (±2.5%)

1.3 Model 6870 Moving Magnet Capacitive Position Detector Optical Scanner

Supports 12mm and 15mm beam apertures. All Position Detector specifications apply with our servo driver after a 30 second warm-up. All angles are in mechanical degree. Consult manual for complete operating instructions.
Mechanical Specifications

Rated Angular Excursion:40°
Rotor Inertia:2.0 gm*cm2, +/-10%
Torque Constant:1.8X105dyne-cm/amp, +/-10%
Maximum Coil Temperature:110°C
Thermal Resistance (Coil to Case):1.0°C/Watt, Max
Dimension40.6x73.2mm

Electrical Specifications/Drive Mechanism

Coil Resistance:1.4 Ohms, +/-10%
Coil Inductance:275uH, +/-10%
Back EMF Voltage:0.3mV/degree/sec, +/-10%
RMS Current:5.3 Amperes at Tcase of 50°C, Max
Peak Current:25 Amperes, Max
Small Angle Step Response Time:0.7ms, with balanced 2.0gm*cm2 load

Position Detector

Linearity:99.9%, Minimum, over 40 degrees
Scale Drift:50PPM/°C, Maximum
Zero Drift:15 microradians/°C, Maximum
Repeatability, Short Term:8 microradians
Output Signal, Common Mode:585 microamperes with AGC voltage of 10VDC, +/-20%
Output Signal, Differential Mode:14.5 µA/degree, at common mode current of 585 µA, +/-20%

1.4 Model 6880 Moving Magnet Capacitive Position Detector Optical Scanner

Supports 20 mm and 30 mm beam apertures.

  • 6880 has D-sub 9 connector and +/-40o optical

  • 6880A has MiniCT split cable and +/-40 o optical

  • 6880M has D-sub 9 connector and +/-20o optical

  • 6880MA has MiniCT split cable and +/-20 o optical

  • 6880M140 has D-sub 9 connector and +/-60o optical

  • 6880MA140 has MiniCT split cable and +/-60 o optical

All Position Detector specifications apply with our servo driver after a 30 second warm-up. All angles are in mechanical degrees. Consult manual for complete operating instructions.
Mechanical Specifications

Rated Angular Excursion:40°
Rotor Inertia:6.4 gm*cm2, +/-10%
Torque Constant:2.54X105dyne-cm/amp, +/-10%
Maximum Coil Temperature:110°C
Thermal Resistance (Coil to Case):0.75°C/Watt, Max
Dimension40.6x75.1mm

Electrical Specifications/Drive Mechanism

Coil Resistance:1.0 Ohms, +/-10%
Coil Inductance:280uH, +/-10%
Back EMF Voltage:0.44mV/degree/sec, +/-10%
RMS Current:7.5 Amperes at Tcase of 50°C, Max
Peak Current:25 Amperes, Max
Small Angle Step Response Time:0.9ms, with balanced inertia matched load

Position Detector

Linearity:99.9%, Minimum, over 40 degrees
Scale Drift:50PPM/°C, Maximum
Zero Drift:10 microradians/°C, Maximum
Repeatability, Short Term:8 microradians
Output Signal, Common Mode:970 microamperes with AGC voltage of 10VDC, +/-20%
Output Signal, Differential Mode:22 µA/degree, at common mode current 970 µA, +/- 20%

1.5 Model 6450 Moving Coil Closed Loop Galvanometer Based Optical Scanner with Capacitive Position Detector

Supports 12 mm apertures. All Position Detector specifications apply with our servo drivers after a 30 second warm-up. All angles are in mechanical degrees. Consult manual for complete operating instruction.
Mechanical Specifications

Rated Angular Excursion:40°
Rotor Inertia:2.3 gm*cm2, +/-10%
Torque Constant:0.45X106dyne-cm/amp, +/-10%
Maximum Coil Temperature:150°C
Thermal Resistance (Coil to Case):5.0°C/Watt, Max
Dimension41.2x108.2mm

Electrical Specifications/Drive Mechanism

Coil Resistance:4.0 Ohms, +/-10%
Coil Inductance:450uH, +/-10%
Back EMF Voltage:0.8mV/degree/sec, +/-10%
RMS Current:1.8 Amperes at Tcase of 50°C, Max
Peak Current:6.0 Amperes, Max
Small Angle Step Response Time:2.0ms, with balanced inertia matched load

Position Detector

Linearity:99.9%, Minimum, over 40 degrees
Scale Drift:50PPM/°C, Maximum
Zero Drift:15 microradians/°C, Maximum
Repeatability, Short Term:2 microradians
Output Signal, Common Mode:970 microamperes with AGC voltage of 10VDC, +/-20%
Output Signal, Differential Mode:21.5 µA/degree, at common mode current 970 µA, +/-20%

Driver: 67045

2. Servo Electronics

galvo driverOur performance PID drivers are fully-featured servos available in compact, dual-axis, and high power configurations. Delivering both accuracy and power, our driver solutions support even the most demanding applications requiring fast speeds with high repeatability, linearity, and stability. The combination of size, performance, and flexibility make our analog servos the ideal choice for your integrated scanning systems.
Get value-for-performance in a compact size with maximum drive power

  • Designed for stability and high-bandwidth control that enables maximum throughput

  • Compact product sizes ensure flexible, easy integration within complex systems

  • On-board protection circuitry provides reliability during evaluation and operation

  • Includes convenient outputs for galvanometer position, error, and velocity signals

  • Fully-optimized performance with Cambridge Technology scanning products

2,1 Analog Servo Drivers

(1) List and Comparison of 671, 672 and 673

Part Number671 Series Single672 Series Single673 Series Dual
Output StageDifferentialSingle-EndedDifferential
Analog Input Impedance200K +/- 1% ohms (Differential) 100K +/- 1% ohms (Single Ended)200K +/- 1% ohms (Differential) 100K +/- 1% ohms (Single Ended)200K +/- 1% ohms (Differential) 100K +/- 1% ohms (Single Ended)
Analog Output Impedance1K +/- 1% ohms (for all other observation outputs)1K +/- 1% ohms (for all other observation outputs)2K +/- 1% ohms (for the Position Output and Current Monitor observation pins) 4.75k +/- 1% ohms for all other observation pins
Position Input Scale Factor0.5 volt/mechanical degree (2 degrees/volt), other configurations available0.5 volt/mechanical degree (40° system), 0.67 volt/degree (30° system)0.5 volt/mechanical degree (2 degrees/volt), other configurations available
Position Input Range+/- 10 volts, maximum+/- 10 volts, maximum+/- 10 volts, maximum
Position Offset Range+/- 5% of Input Range, typical+/- 5% of Input Range, typical+/- 5% of Input Range, typical
Digital Position Input Range216 dac countsN/AN/A
Non Linearity of 16-Bit Digital Input0.006% of full scale, maximumN/AN/A
Position Output Scale Factor0.5 volt/degree0.5 volt/degree0.5 volt/degree
Error Output Scale Factor0.5 volt/degree0.5 volt/degreeN/A
Velocity Output Scale FactorAnalog output (scaled by position differentiator gain)Analog output (scaled by position differentiator gain)Analog output (scaled by position differentiator gain)
Fault OutputOpen collector: 1K ohm output impedance (pulls down to -15V), with 10mA sink capabilityTTL output pulled up to a +5V supply voltage with a 100k resistor. High level = 2.5V, low level = 0VCMOS output with 4.75k ohm in series High level = 11.5V, low level = .05V
Temperature Stability of Electronics20 ppm per °C20 ppm per °C20 ppm per °C
Power Supply Requirements+/- 15 to +/- 28VDC configurations available+/- 15 to +/- 28VDC configurations available+/- 15 to +/- 28VDC configurations available
Maximum Drive Current Limit10 amps peak1 5 amps rms (power supply and load dependent)10 amps peak 5 amps rms (power supply and load dependent)10 amps peak 5 amps rms (power supply and load dependent)
Operating Temperature Range0 - 50°C0 - 50°C0 - 50°C
Dimensions (Board with heatsink bracket; approximate, cm)10.16 x 6.68 x 2.69 cm5.40 x 6.03 x 2.69 cm10.03 x 7.75 x 3.07 cm

(2) MicroMax® Model 677XX Single Axis

FEATURES:

  • Smallest Servo Driver For Compact, Low Cost System Integration

  • Position, Error and Velocity Output Signals

  • Input Scale and Offset Adjustment

  • On Board Protection Circuitry

The MicroMax Model 677XX Class 0 non-integrating driver provides an extremely compact, high performance and fully featured servo package. At just 2 inches in width and 2.5 in length it is among the smallest servo drivers commercially available, bringing easier integration to your scanning solution. Featuring automatic gain control (AGC), low noise system damping, linearity compensation and high stability components, the 677XX servo provides high quality and stable positioning.
Designed with flexibility in mind, the MicroMax Model 677XX features differential analogue inputs, flexible power supply configurations and positioning control allowing for optimization of system positioning angles, speed and accuracy. System position, velocity and error output signals make integrations into complex scanning system applications easy and accurate. Integral mounting hardware, low profile connectors and the overall small size allow for compact system designs with easy integration.
The New Smaller Size MicroMax 677XX single axis servo driver can be configured for optimal performance with our 6200 and 6800 line of closed loop, galvanometer based optical scanners. Used with our patented position detection galvanometer technology, the MicroMax 677XX provides improved time and temperature stability without the need for thermal compensation. On board protection circuitry ensures reliable system control during integration and operation. To guarantee safe operation and extended product lifetime, the MicroMax 677XX monitors and controls galvanometer rms power and features a socketed fuse for added system protection. It also utilizes servo signal conditioning to maintain controlled performance within rated angular excursion limits. This combination of size, flexibility and price make the MicroMax Model 677XX the ideal choice where high levels of speed and performance are required in the most compact environment.
Specifications:

Analog Input Impedance400K +/-1% ohms (Differential)
200K +/-1% ohms (Single Ended)
Analog Output Impedance1K +/-1% ohms (for all other observation outputs)
Position Input Scale Factor0.5 volt/mechanical degree (40o System), 0.67 volt/degree (30o System)
Position Input Range+/-10 volts, maximum
Position Offset Range+/-10 volts
Position Output Scale Factor0.5 volt/degree
Error Output Scale Factor0.5 volt/degree
Velocity Output Scale FactorAnalog output (scaled by position differentiator gain)
Power Supply Requirements+/-15 to +/-28VDC configurations available
Maximum Drive Current Limit10 amps peak,5 amps rms (power supply and load dependent)
Operating Temperature Range0 -50 oC
Size5.08 cm x 6.35 cm x 2.69 cm

The 677 servo board is available in a variety of configurations, as detailed below:

(3)The MicroMax® Model 673XX Dual Axis

The MicroMax® Model 673XX Dual Axis Driver Board: our dual axis servo offers integrating or non-integrating servo loop configurations, error and/or slew rate input signal conditioning and high stability components for extremely accurate positioning in applications that demand the best repeatability, linearity, stability and cost in a very compact system. Low profile connectors and the dual axis design of the 673XX allow for ease of integration in any system, while built-in system conditioning and status monitoring ensures complete and reliable system control.

(4) Servo Driver MicroMax® 671XX Single Axis

The MicroMax® 671XX Driver Board: our advanced servo topology and the availability of Class 1 error integration provides excellent positioning repeatability, accuracy and stability in a compact single axis configuration. High stability components provide excellent time and temperature stability. Built-in system conditioning and status monitoring ensures complete and reliable system control during integration and operation.
We offer a digital input option with the 671 and 670 servo drivers. The Model 6757 Parallel Digital Interface is a module that mounts onto the MicroMax Servo Controller. This allows the user to provide a 16 BIT parallel digital position command. There are also four control lines allowing the user to address and control each input module using one 16 BIT data bus. The servo driver easily be configured to switch between digital and analog position command control. Each module is supplied with a mating single ended cable. One module is needed for each scanner. This is optional and is only required if a digital command is being used. This option can be easily added at a later date.
The 671 servo board is available in a variety of configurations, as detailed below:

(5) Servo Driver MicroMax® 670XX Single Axis

As the complexity and specification requirements of today's optical systems increase, so does the need for high performance, high accuracy, and compact mirror positioning systems. The MicroMaxTM Series 670 system was designed for applications that require high performance specifications.

The Series 670 Single axis Board-Level Mirror Positioning System consists of a

single-channel servo amplifier on a 2.50” x 4.00” board and a high performance scanner. The scanner is designed for a specific range of inertial loads, allowing mirrors with inertias from less than 0.001 gm-cm2 to greater than 100,000 gm-cm2 to be precisely controlled.

All angles are in mechanical degree. All specifications apply after a 1 minute warm up period.

Analog Input Impedance200K + 1% ohms (Differential);
100K + 1% ohms (Single Ended)
Position Output Impedance1K + 1% ohms (For all observation outputs)
Position Input Scale Factor0.5 volt/o (2o/volt)
Analog Position Input Range+ 10 volts max
Digital Position Input Range216 dac counts
Non-Linearity of 16 Bit Digital Input0.006% of full scale, max
Position Offset Range+ 2 volts
Pos. Output Scale Factor0.5 volt/o
Error Output Scale Factor0.5 volt/o
Velocity Output Scale FactorAnalog (scaled by position differentiator gain)
Fault OutputOpen Collector, 1K ohm output impedance (pulls down to –15V), with 10mA sink capability
Temperature Stability of Electronics20PPM per oC
Input Voltage Requirements+/-15 to +/-28VDC (current varies with motor configuration)
Maximum Drive Current Limit, Peak10 Amperes
Maximum Drive Current Limit, RMS5 Amperes (power supply, load, & heat sink dependent.)
Operating Temperature Range0 - 50°C
Size4.0in x 2.in x 1.06in; 10.16cm x 6.35cm x 2.69cm
Weight3.07 ounces (87 grams)

2.2 Digital Servo Drivers

galvo driver

Our digital servo drivers feature self-calibration, state-space control, and command input optimization, features that are ideal for scanning applications demanding the highest speeds and accuracy. The drivers’ patented technology delivers maximum system performance, flexibility, and ease of use with on-board processors that characterize the scanning components every time you turn on the system. For ease of integration, our compact DC Model servos include flexible power supply configurations, integral mounting hardware, and low-profile connectors.

Take full control using our easy-to-integrate, high-performance servos

  • Simulation-based, pre-filtering algorithms for optimization of motion control

  • Self-tuning and start-up calibration provide reduced system manufacturing cost

  • Simplified field service increases savings and system up-time

  • Compact, flexible servo footprint is easy to configure within complex systems

  • Optimized performance provided with Cambridge Technology scanning products

Part NumberDC900 ModelDC2000 ModelDC3000 Plus Model (low noise)
Number of AxesSingleDualDual
Command InputAnalog (±5V differential, ±10V single-ended) XY2-100 High Speed Serial DigitalXY2-100 High Speed Serial DigitalXY2-100 High Speed Serial Digital
Analog Input Impedance400K +/-1% ohms (Differential) 200K +/-1% ohms (Single Ended)
Analog Output Impedance1K +/-1% ohms (for all observation outputs)The un-terminated output of OPA2227, <1ΩThe un-terminated output of OPA2227, <1Ω
Position Input Scale Factor0.50 volt/degree (40°system) 0.67volt/degree (30°system) 1.00 volt/degree (20°system)
Analog Position Input Range+/- 10 volts max
Position Output Scale Factor0.5 volt/degree0.333V/degree non-differential0.333V/degree non-differential
Power Supply Requirements+/-15 to +/-32VDC configurations available+/-15 to +/-32VDC configurations available+/-15 to +/-28VDC configurations available
Maximum Drive Current Limit8 amps peak, 5 amps rms (power supply and load dependent)10 amps peak, 2.5 amps rms (per axis) (power supply and load dependent)20 amps peak, 5 amps rms (per axis) (power supply and load dependent)
Quiescent Power15W16W11.5W
Dither (RMS)8 Ωrad7 Ωrad4 Ωrad
Operating Temperature Range0 - 50°C0 - 50°C0 - 50°C
Dimensions15.14 x 10.48 x 4.45 cm10.50 x 7.50 x 6.44 cm10.50 x 7.50 x 6.44 cm

For more detailed information on CTI series galvos, please download here.

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